Ulvac Cryopump High Vacuum Pump

Product Description:
• Suitable for medium and large-size equipments
• Resistant to thermal load. Suitable for various processes
• Flat and compact design
• Supports system downsizing

Product Specification:
• Model: CRYO-U12H
• Pumping Speeds (20 Degrees): 4,000 (Nitrogen)
• Pumping Speeds (20 Degrees): 6,000 (Hydrogen)
• Pumping Speeds (20 Degrees): 3,300 (Argon)
• Pumping Speeds (20 degrees): 9,500 (Water)
• Ultimate Pressure: 10-7(10-9) Pa(Torr)
• Cool Down Time: 85/75(50/60) min(Hz)
• Mounting Flange: UVG-300,10BANSI
• Compressor Unit: C30VR
• Weight of Cryopump: 40.0kg

Document:
Product Leaflets:
http://www.ulvac.com.my/wp-content/uploads/2019/01/cryopump_catalog.pdf