Ulvac Diaphragm Type Dry Vacuum Pump

Product Description:
• Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms.
• Pump structure makes Oil-free environment and maintenance easy.
• Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.

Product Specification:
Model: DA-30D
• Application:
- Vacuum chucks, wafer and tip handling devices
- Vacuum tweezers, medical appliances
- Printing equipment
- Automatic packing machines
- Optical appliances
- Semiconductor industry
- Injection molding machine
• Actual Pumping Speed: 30 (50Hz) L/min, 36 (60Hz) L/min
• Ultimate Pressure: 6.7 × 103  Pa
• Motor: Single Phase, 100V, 200W, 4P, Split Phase Starting
• Full Load Current: 5.6 (50Hz), 5.0 (60Hz) A
• Weight: 11.0 kg
• Inlet, Outlet Pipe Diameter: O.D. dia.9 × I.D. dia.5 (Rc 1/4) mm
• Ambient Temperature: 7 - 40°C
• Overall Dimensions: 212(W) × 278(L) × 224.5(H)

Model: DA-60S
• Application:
- Vacuum chucks, wafer and tip handling devices
- Vacuum tweezers, medical appliances
- Printing equipment
- Automatic packing machines
- Optical appliances
- Semiconductor industry
- Injection molding machine
• Actual Pumping Speed: 60 (50Hz) L/min, 72 (60Hz) L/min
• Ultimate Pressure: 6.7 × 103 Pa
• Motor: Single Phase, 100V, 200W, 4P, Split Phase Starting
• Full Load Current: 5.6 (50Hz), 5.0 (60Hz) A
• Weight: 11.0 kg
• Inlet, Outlet Pipe Diameter: O.D. dia.9 × I.D. dia.5 (Rc 1/4) mm
• Ambient Temperature: 7 - 40°C
• Overall Dimensions: 212(W) × 278(L) × 224.5(H)

Document:
Product Leaflets:
http://www.ulvac.com.my/wp-content/uploads/2019/01/diap_DADAT_catalog.pdf