Ulvac Dry Vacuum Pump - LS Series

Product Description:
High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.

Product Specification:
Model: LS Series
• 2 Types for Specific Application:-
- C Type: Clean process (LS***A-C)
Feature: Low power consumption model (with built-in ECO-SHOCK)
Applications: For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc

- L Type: Light Process (LS***A-L)
Feature: Light Process Model (with surface treatment and purge function)
Applications: For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc

• High Pumping Speed:
- High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced

• Low Power Consumption:
- ECO-SHOCK technology realizes low power consumption (C Type)
- Power consumption at the ultimate pressure is the industry-leading 0.6kW or less LS120A-C

• Low Noise:
- Built-in silencer achieves the noise level 61dB(A) or less

• Low Running-Cost:
- No shaft sealing gas
*Purge gas is available with L Type.

• 4 Kinds of Model:
- Pumping Speed – 120～1200m3/h Class
* With mechanical booster pump
- Model is selectable with the optimum pumping speed according to the application

Document:
Product Leaflets:
http://www.ulvac.com.my/wp-content/uploads/2018/12/1055E_LS.pdf