Ulvac Scroll Piston Type Dry Vacuum Pump

Product Description:
• Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls.
• Operation from atmospheric pressure is possible.
• High ultimate pressure level is attainable.
• Low vibration and low noise.
• Maintenance cycle can be controlled by hour meter.

Product Specification:
Model: DIS-90 Series
• Application:
- Analytical equipment
- Gas recovery system
- Coating equipment
- Back pump for TMP
- Helium leak detector
- Manufacturing process for semiconductor
- Pick and transfer system
- Cleaning and drying
- Degassing / deforming
- Packaging
• Nominal Pumping Speed: 90 (50Hz) L/min, 108 (60Hz) L/min
• Ultimate Pressure: 5.0 Pa
• Motor: Single Phase, 100/115/200/230V, 150W, 4P, Capacitor Start & Run
• Full Load Current: 
- 2.6/1.3/1.6 (100/200/230V) (50Hz) A
- 2.1/2.2/1.1/1.1 (100/115/200/230V) (60Hz) A
• Weight: 1 kg
• Inlet, Outlet Pipe Diameter: Inlet pipe KF25 Outlet pipe KF16 mm
• Ambient Temperature: 5 – 40°C
• Water Vapor Handling: ≤5 (A.F. open) g/day
• Overall Dimensions: 214(W) × 308(L) × 225(H)

Model: DIS-251 Series
• Application:
- Analytical equipment
- Gas recovery system
- Coating equipment
- Back pump for TMP
- Helium leak detector
- Manufacturing process for semiconductor
- Pick and transfer system
- Cleaning and drying
- Degassing / deforming
- Packaging
• Nominal Pumping Speed: 250 (50Hz) L/min, 300 (60Hz) L/min
• Ultimate Pressure: 1.6 Pa
• Motor: 
- 100/115/200/230V, 400W, 4P, Capacitor Start & Run (Single Phase)
- 200/208/230/380/400/415/460V, 400W, 4P (Three Phase)
• Weight: 25 kg (Single Phase), 23kg (Three Phase)
• Inlet, Outlet Pipe Diameter: Inlet Pipe KF25 Outlet Pipe KF16 mm
• Ambient Temperature: 5 - 40°C
• Water Vapor Handling: ≤25 (A.F. open) g/day
• Overall Dimensions: 
- 252(W) × 400(L) × 336(H)mm (Single Phase)
- 252(W) × 370(L) × 336(H)mm (Three Phase)

Document:
Product Leaflets:
http://www.ulvac.com.my/wp-content/uploads/2019/01/ScrollPump_DIS_catalog.pdf